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Robust Calibrated Measurement at Frequencies from 140 GHz to 1.1 THz

Anthony Lord & Nancy Friedrich discuss the MeasureOne THz probing solution developed by Cascade Microtech and Dominion MicroProbes Inc.

Millimeter and sub-millimeter wavelength on-wafer probes and associated accessories for metrology-grade measurement of devices and materials with frequencies from 140 GHz to 1.1 THz. The probes offer low insertion loss, as well as excellent probe tip and sample visibility. Probe stations can be configured with programmable positioners to allow automated and repeatable sub-micron positioning during TRL calibration to ensure the highest precision at the probe tip.
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